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                                       Details for article 4876 of 6662 found articles
 
 
  RF hydrogen plasma influence on shallow and deep levels in crystalline silicon
 
 
Title: RF hydrogen plasma influence on shallow and deep levels in crystalline silicon
Author: Szekeres, A.
Simeonov, S.S.
Kafedjiiska, E.
Appeared in: Physica. B, Condensed matter
Paging: Volume 170 (1991) nr. 1-4 pages 4 p.
Year: 1991
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 4876 of 6662 found articles
 
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